Method for fabrication of force sensing elements by laminating d

Measuring and testing – Fluid pressure gauge – Diaphragm

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296211, 73862627, 338 47, G01L 122, G01L 906

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active

051429152

ABSTRACT:
Unfired ceramic tape is fired to a ceramic substrate during the laminar fabrication of a thick film force sensing element to provide the fabricated sensing element with a force sensing zone which is effective in response to the application of force thereto to induce strain in the fired ceramic tape. A conductor and thick film resistor system is printed and fired to the tape during the fabrication process to provide the fabricated sensing element with an electrically detectable signal correlating with the induced strain. Accelerometer and pressure sensor embodiments are disclosed. The invention is well-suited for the commercial mass-production of sensing elements, such as for automotive vehicle usage, because it can practiced through the use of automated production processes.

REFERENCES:
patent: 4522067 (1985-06-01), Burger et al.
patent: 4548086 (1985-10-01), Kaster
patent: 4894635 (1990-01-01), Yajima et al.
Sawhill, Eustice, Horowitz, Gar-El and Travis, "Low Temperature Co-Firable Ceramics with Co-Fired Resistors".
Glas, Kuhnt, Stecher; "Integrated Hybrid Pressure Sensor Using A Piezoresistive Thickfilm Sensor Element"; SAE International Congress 1987, Paper 870286.
DuPont Electronics, "Streamline Processing with DePont's Tape on Substrate System".
A. L. Eustice, S. J. Horowitz, J. J. Stewart, A. R. Travis and H. T. Sawhill, "Low Temperature Co-Fireable Ceramics: A New Approach for Electronic Packaging"; 36th Electronics Component Conference, (1986), Proceedings, pp. 37-47.

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