Method for fabrication of discrete dynode electron multipliers

Details Method for fabrication of discrete dynode electron multipliers Method for fabrication of discrete dynode electron multipliers

1995-07-25

1997-04-08

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 49, H01J 4318, H01J 912

Patent

active

056182171

ABSTRACT:
A method for manufacturing a discrete dynode electron multiplier includes employing micromachining and thin film techniques to produce tapered apertures in an etchable substrate, bonding the substrates together and activating the internal surfaces of the etched substrate using chemical vapor deposition or oxidizing and nitriding techniques.

REFERENCES:
patent: 4099079 (1978-07-01), Knapp
patent: 4422005 (1983-12-01), Washington et al.
patent: 4482836 (1984-11-01), Washington et al.
patent: 4626736 (1986-12-01), Mansell
patent: 4649314 (1987-03-01), Eschard
patent: 4825118 (1989-04-01), Kyushima
patent: 5378960 (1995-01-01), Tasker et al.

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