Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2006-07-25
2009-08-11
Luu, Thanh X (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C257S415000, C359S198100
Reexamination Certificate
active
07573022
ABSTRACT:
The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
REFERENCES:
patent: 5867297 (1999-02-01), Kiang et al.
patent: 6285485 (2001-09-01), Ferreira
patent: 6331909 (2001-12-01), Dunfield
patent: 6347002 (2002-02-01), Hagelin et al.
patent: 6603588 (2003-08-01), Hagelin et al.
patent: 6628041 (2003-09-01), Lee et al.
patent: 6758983 (2004-07-01), Conant et al.
patent: 6769616 (2004-08-01), Fu et al.
patent: 6872319 (2005-03-01), Tsai
patent: 6947189 (2005-09-01), Hagelin et al.
patent: 2002/0119589 (2002-08-01), Fischer et al.
patent: 2002/0149512 (2002-10-01), Oki
patent: 2004/0100679 (2004-05-01), Kuo
patent: 1 227 061 (2002-07-01), None
patent: WO 01/88594 (2001-11-01), None
H. Choo et al, “A Simple Process to Fabricate Self-Aligned, High-Performance Torsional Microscanners; Demonstrated Use in a Two-Dimensional Scanner”, Optical MEMS And Their Application Conference, 2005, IEEE/Leos International Conference on Oulu, Finland, Aug. 1-4, 2005 Piscataway, NJ, pp. 21-22.
K.F. Chan et al, “High-resolution maskless lithography”, Journal of Microlithography, Microfabrication, and Microsystems, vol. 2, Issue 4, Oct. 2003, pp. 331-339.
P.R. Patterson et al, “A Scanning Micromirror With Angular Comb Drive Actuation”, International Conference on Micro Electro Mechanical Systems, 2002, pp. 544-547, Las Vegas, NV, USA.
J. Kim et al, “Microfabricated Torsional Actuator Using Self-Aligned Plastic Deformation”, IEEE Transducers, 2003, pp. 1015-1018, Boston, MA, USA.
D.T. McCormick et al, “Multiple Layer Asymmetric Vertical Comb-Drive Actuated Trussed Scanning Mirrors”, IEEE/LEOS International Conference on Optical MEMS, 2003, pp. 12-13, Waikoloa, Hawaii, USA.
J.-S. Wang et al, “Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography”, Sensors and Actuators: A Physical, vol. 114, Issue 2-3, Sep. 1, 2004, pp. 528-535.
R.A. Conant et al, “A Flat High-Frequency Scanning Micromirror”, Hilton Head Solid-State Sensor and Actuator Workshop, 2000, pp. 6-9, Transducer Research Foundation, Cleveland, OH, USA.
H. Schenk et al, “A resonantly excited 2D-micro-scanning-mirror with large deflection”, Sensors and Actuators A, vol. 89, (2001), pp. 104-111.
Choo Hyuck
Demmel James
Garmire David
Muller Richard S.
Luu Thanh X
Michaelson Peter L.
Michaelson & Associates
The Regents of the University of California
Wolken, Jr. George
LandOfFree
Method for fabricating vertically-offset interdigitated comb... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for fabricating vertically-offset interdigitated comb..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating vertically-offset interdigitated comb... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4080449