Method for fabricating vertical MOSFETs

Fishing – trapping – and vermin destroying

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357 2313, 437913, 437 23, H01L 21425, H01L 2172

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active

046883231

ABSTRACT:
A method for fabrication a vertical MOSFET which contains a protective element for protecting the gate electrode of an insulated gate field effect transistor. The protective element is formed of the same semiconductor layer as that of the gate electrode of the insulated gate field effect transistor and is formed integrally with the gate electrode on an insulating film formed on the surface of a semiconductor substrate.

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Patent Abstracts of Japan, E-27, vol. 4, No. 237, No. 55-91173, Sep. 25, 1980.
Severns, Electronics, "MOSFETs Rise to New Levels of Power," May 22, 1980, pp. 143-152.

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