Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Electrolyte composition or defined electrolyte
Reexamination Certificate
2006-07-11
2006-07-11
King, Roy (Department: 1742)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Electrolyte composition or defined electrolyte
C205S640000
Reexamination Certificate
active
07074317
ABSTRACT:
An electrochemical method is provided for producing trenches for trench capacitors in p-doped silicon with a very high diameter/depth aspect ratio for large scale integrated semiconductor memories. Trenches (macropores) having a diameter of less than about 100 nm and a depth of more than 10 μm can be produced on p-doped silicon having a very low resistivity at a high etching rate.
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Birner Albert
Goldbach Matthias
Schumann Dirk
Alexander Michael P.
Greenberg Laurence A.
Infineon - Technologies AG
King Roy
Locher Ralph E.
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