Method for fabricating thin films of pyrolytic carbon

Details Method for fabricating thin films of pyrolytic carbon Method for fabricating thin films of pyrolytic carbon

1980-03-13

1982-06-01

Hoag, Willard E.

Plastic and nonmetallic article shaping or treating: processes

With step of cooling to a temperature of zero degrees c. or...

264 291, 264 296, 264 81, 264334, B29C 2500, B29C 700

Patent

active

043327516

ABSTRACT:
The present invention relates to a method for fabricating ultra-thin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the polymeric resin coating with thermally induced forces.

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