Method for fabricating the heater buried plane waveguide path ty

Details Method for fabricating the heater buried plane waveguide path ty Method for fabricating the heater buried plane waveguide path ty

1995-11-29

1997-08-05

Arbes, Carl J.

Metal working

Method of mechanical manufacture

Electrical device making

385 16, 385 17, H01P 1100

Patent

active

056530080

ABSTRACT:
The present invention relates to a method for fabricating the plane waveguide path type of the heater buried optical switch, and it exposes the thin film heater removing the second clad layer to speed the heat radiation of the thin film heater by forming flatly the first clad layer having the thin thickness of about 5-10 .mu.m on the channel waveguide path on which the channel waveguide path is formed on the lower clad layer, and forming the second upper clad layer in the thickness of about 15-20 .mu.m on the first clad layer and the thin film heater after the thin heater having the line width of about two times as compared with these of the channel waveguide path is formed at the channel waveguide path and the corresponding portion on the first upper clad layer. Therefore, the crosstalk between the neighboring channel waveguides can be protected since the heat generated in the thin film heater inhibits to transmit the neighboring channel waveguide paths, and the switch velocity accelerates as speeding the heat transmitting velocity, and it can operate at the low operational power.

REFERENCES:
patent: 5002355 (1991-03-01), Caron
patent: 5247594 (1993-09-01), Okuno et al.
Kawachi, Masao; Silica waveguides on silicon and their application to integrated-optic components;Optical and Quantum Electronics 22; pp. 391-416 (1990).
Terui et al;Guided Wave Optical Gate Matrix Switch-Hybrid Integration of Silica-based Optical Waveguide Circuits and Laser Diode Optical Gates; INTT Review, pp. 114-121 (Nov. 89).

Affiliated with

Also associated with

Rating

Method for fabricating the heater buried plane waveguide path ty does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating the heater buried plane waveguide path ty, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating the heater buried plane waveguide path ty will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1066547