Coating processes – Electrical product produced – Condenser or capacitor
Patent
1977-08-26
1980-07-29
Smith, John D.
Coating processes
Electrical product produced
Condenser or capacitor
156662, 204192C, 357 71, 427 89, 427 90, 427 91, 427 99, 427 42, 427259, 427250, H01L 21443, H01L 21477
Patent
active
042151562
ABSTRACT:
A silicon semiconductor device having contacts which include tantalum. The tantalum is useful in particular for fabricating Schottky barrier diodes having a low barrier height. The method includes: precleaning the silicon substrate prior to depositing the tantalum; depositing the tantalum at low pressure and low substrate temperature to avoid oxidation of the tantalum; and sintering the contact to reduce any interfacial charges and films remaining between the silicon and tantalum. When a metal which reacts with silicon during processing, such as aluminum, is used as interconnection metallurgy, a layer of chrome must be deposited between the tantalum and aluminum.
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Dalal Hormazdyar M.
Ghafghaichi Majid
Kasprzak Lucian A.
Wimpfheimer Hans
Bunnell David M.
Galvin Thomas F.
International Business Machines - Corporation
Smith John D.
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