Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1988-08-05
1990-08-21
Morganstern, Norman
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505732, 505730, 427 62, 4271263, 427 38, 427 39, 427 42, 4272553, B05D 512, B05D 306, C23C 1400
Patent
active
049506420
ABSTRACT:
A process for fabricating a superconducting oxide thin film is disclosed which comprises the steps of separately evaporating metal elements, of which the superconducting oxide thin film with a desired stoichiometry is to be composed, to a substrate and simultaneously irradiating the substrate with oxygen plasma generated by RF wave or ECR microwave to form a crystalline oxide film without further annealing.
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Aida Toshiyuki
Fukazawa Tokuumi
Miyauchi Katsuki
Okamoto Yukio
Takagi Kazumasa
Hitachi , Ltd.
King Roy V.
Morganstern Norman
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