Method for fabricating stable magnetoresistive sensors

Details Method for fabricating stable magnetoresistive sensors Method for fabricating stable magnetoresistive sensors

1997-07-28

1998-09-08

Pianalto, Bernard

Coating processes

Magnetic base or coating

Magnetic coating

427131, 427132, 427548, 427599, B05D 512

Patent

active

058042504

ABSTRACT:
A method of fabricating a stable, self-biased paired MR (magnetoresistive) sensor comprising the steps of depositing a first MR film with a diffusion barrier layer on either side on a substrate; depositing an oxide passivation/spacer layer on top of the first MR structure; depositing a second MR film with a diffusion barrier layer on either side on the spacer layer; depositing an oxide passivation layer on top of the second MR structure; wherein the MR films are deposited with induced uniaxial anisotropy; and thermal annealing both MR films to stabilize their anisotropy field.

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