Method for fabricating silicon-on-sapphire monolithic microwave

Metal working – Method of mechanical manufacture – Assembling or joining

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

29571, 29576B, 148 15, 148187, 357 23, 357 49, 357 51, H01L 2980, H01L 2702, H01L 2904

Patent

active

044184700

ABSTRACT:
A fabrication technique for monolithic microwave integrated circuits employs silicon-on-sapphire wafers. Active and passive elements are formed together in a series of implant and deposition steps. Electrically isolated islands of semiconductor material are defined upon the substrate. Multiple metallization deposits are employed to simultaneously interconnect the individual circuit elements and form passive elements upon the integrated circuit. The technique allows mass production of integrated circuits with considerable raw material savings.

REFERENCES:
patent: 3397447 (1968-08-01), Currin et al.
patent: 3489953 (1970-01-01), Thomas
patent: 3958266 (1976-05-01), Athanas
patent: 3997908 (1976-12-01), Schloeherer et al.
patent: 4002501 (1977-01-01), Tamura
patent: 4072974 (1978-02-01), Ipri
patent: 4183134 (1980-01-01), Oehler et al.
patent: 4199773 (1980-04-01), Goodman et al.
patent: 4242156 (1980-12-01), Peel
patent: 4344223 (1982-08-01), Bulger et al.
Naster, R. J. et al. "Silicon-on-Sapphire Monolithic Microwave ICs", 1981 Digest of Technical Papers, Feb. 18-20, 1981, IEEE Solid State Circuits Counsel, IEEE New York Sect., Univ. of Penn., pp. 72-73.
"Strategic and Tactical Radar Array Modules (STRAM)-Phase I", Final Report, Jan. 1981, prepared by Electronics Laboratory, General Electric Company, Syracuse, N.Y. for RADC, Griffis Air Force Base, Rome, N.Y. under Contract No. F30602-79-C-0159.
Nov. 1980 GOMAC-Naster, R. J. et al. "SOS Monolithic Microwave Integrated Circuits for Radar Applications", 1980 Digest of Papers, pp. 291-294.
Lewis, E. T., et al. "SOS IGFETS and MESFETS for L and S Band Radar Applications", pp. 295-298, Nov. 1980 GOMAC.
Laighton, D., et al., "Silicon-on-Sapphire (SOS) Monolithic Transceiver Module Components for L- and S-Band", pp. 299-302, Nov. 1980 GOMAC.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for fabricating silicon-on-sapphire monolithic microwave does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating silicon-on-sapphire monolithic microwave , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating silicon-on-sapphire monolithic microwave will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2023037

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.