Patent
1987-12-04
1990-04-03
Hille, Rolf
357 233, H01L 2354, H01L 21441, H01L 21461
Patent
active
049145002
ABSTRACT:
A new method for fabricating a semiconductor device, e.g., a MOS or MES IC, as well as the resulting device, are disclosed. In accordance with the new method, a semiconductor device is formed, at least in part, by forming a material region which includes metal, e.g., elemental metal or a metal-containing compound, on a semiconductor substrate. One or more dopants are implanted into the material region, and the substrate is heated in order to diffuse the dopants out of the material region and into the substrate, thus forming a dopant-diffused substrate region, e.g., a source or drain. Significantly, the new method involves implant conditions which yield a material region-to-substrate specific contact resistance equal to or less than about 10.sup.-6 .OMEGA.-cm.sup.2. In addition, the new method involves heating temperatures and heating times which yield a dopant-diffused substrate region having a depth, relative to the top of the material region, equal to or less than about 0.2 micrometers.
REFERENCES:
patent: 4689869 (1987-09-01), Jambotkar et al.
patent: 4697198 (1987-09-01), Komori et al.
patent: 4769686 (1988-09-01), Horiuchi et al.
Liu Ruichen
Lynch William T.
Williams David S.
AT&T Bell Laboratories
Clark S. V.
Hille Rolf
Tiegerman Bernard
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