Method for fabricating self-stabilized semiconductor gratings

Details Method for fabricating self-stabilized semiconductor gratings Method for fabricating self-stabilized semiconductor gratings

1990-02-28

1991-06-11

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG72, 148DIG95, 148DIG119, 148 334, 437 90, 437133, 437247, 437972, 372 96, H01L 2120

Patent

active

050231987

ABSTRACT:
A quaternary semiconductor diffraction grating, such as an InGaAsP grating suitable for a DFB laser, is embedded in a semiconductor substrate, such as InP. In one embodiment, the grating is fabricated by

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