Metal working – Piezoelectric device making
Patent
1997-06-30
1999-04-20
Eley, Timothy V.
Metal working
Piezoelectric device making
310 95, H04R 1700
Patent
active
058946470
ABSTRACT:
A method for fabricating piezoelectric resonators on a substrate such that the resonant frequency of one resonator is shifted by a small amount from another of the resonators. By means of differential fabrication of the electrodes, the thickness of the metal in an electrode for one resonator is increased relative to that of another resonator to obtain the shift in resonant frequency. The frequency of a single resonator also may be adjusted to a specific frequency by the addition of a differential layer of metal to one of the electrodes comprising the resonator. Mask alignment errors in the differential fabrication process cause non-uniformities in the thickness of the metal in the electrode which non-uniformities significantly degrade the performance of the resonator. The areas of non-uniform thickness of electrode that degrade the performance are removed in this process.
REFERENCES:
patent: 3760471 (1973-09-01), Borner
Buck G. Joseph
Eley Timothy V.
Halpern Benjamin M.
TFR Technologies, Inc.
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