Method for fabricating piezoelectric/electrostrictive device

Details Method for fabricating piezoelectric/electrostrictive device Method for fabricating piezoelectric/electrostrictive device

2005-08-23

2005-08-23

Kim, Paul D. (Department: 3729)

Metal working

Piezoelectric device making

C029S592100, C029S594000, C029S602100, C029S609100, C216S065000, C310S324000, C310S328000, C310S330000, C310S331000, C310S335000, C310S348000, C451S005000, C451S041000

Reexamination Certificate

active

06931698

ABSTRACT:
A piezoelectric/electrostrictive device is provided including a functional element. The functional element includes a base portion, a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane, a piezoelectric/electrostrictive element formed on the deformable portion, and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.

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