Method for fabricating photovoltaic device having improved short

Fishing – trapping – and vermin destroying

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437100, 437101, 437108, 427 74, 136258, H01L 3118, H01L 2120

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active

048450430

ABSTRACT:
Amorphous p-i-n silicon photovoltaic cells with improved short wavelength photoresponse are fabricated with reduced p-dopant contamination at the p/i interface. Residual p-dopants are removed by flushing the deposition chamber with a gaseous mixture capable of reacting with excess doping contaminants prior to the deposition of the i-layer and subsequent to the deposition of the p-layer.

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