Method for fabricating multi-layer polymer thin florelectro-opti

Details Method for fabricating multi-layer polymer thin florelectro-opti Method for fabricating multi-layer polymer thin florelectro-opti

1996-09-12

1998-06-09

Niebling, John

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

438 46, 216 2, 385 2, 385 4, 385 14, 385 40, 385123, 385144, H01L 2100

Patent

active

057632898

ABSTRACT:
A method for fabricating multi-layer polymer thin film of an electro-optical device which has a qualified multi-layer by using photobleaching characteristics of polymer. A proper time of photobleaching only changes the chemical, mechanical and electrical characteristics of the surface of the thin film without having any influence on characteristics of the device, so that when the multi-layer thin film are formed, such a cracking due to a solvent or melting, cracking due to the difference of mechanical tensile strength between each layer can be prevented, thereby obtaining a clean multi-layer thin film.

REFERENCES:
patent: 5178978 (1993-01-01), Zanoni et al.
patent: 5291574 (1994-03-01), Levenson et al.
patent: 5444805 (1995-08-01), Mayer
patent: 5513283 (1996-04-01), Whang et al.
patent: 5555326 (1996-09-01), Hwang et al.
patent: 5561733 (1996-10-01), Ermer et al.

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