Method for fabricating MOSFET-controlled FEA

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Making emissive array

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438 20, 438 22, 438 23, 438 28, H01L 2100

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active

060748877

ABSTRACT:
The present invention is directed to fabricating a MOSFET-controlled FEA, in which the emitter array and the cathode electrode are separated and connected to each other by a MOSFET, the cathode electrode and the n-well beneath the emitter array thereby being used as a source and a drain of the MOSFET.

REFERENCES:
patent: 5359256 (1994-10-01), Gray
patent: 5651713 (1997-07-01), Lee et al.
patent: 5731597 (1998-03-01), Lee et al.
patent: 5780318 (1998-07-01), Hirano et al.
patent: 5872019 (1999-02-01), Lee et al.
patent: 5910701 (1999-06-01), Takemura

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