Fishing – trapping – and vermin destroying
Patent
1993-06-21
1994-07-05
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437193, 437901, 437927, H01L 21465
Patent
active
053267265
ABSTRACT:
The invention comprises a method for fabricating a monolithic chip containing integrated circuitry as well as a suspended polysilicon microstructure. The inventive method comprises 67 processes which are further broken down into approximately 330 steps. The processes and their arrangement allow for compatible fabrication of transistor circuitry and the suspended polysilicon microstructure on the same chip.
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Core Theresa A.
Tsang Robert W. K.
Analog Devices Inc.
Chaudhuri Olik
Tsai H. Jey
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