Method for fabricating mirror array for optical projection syste

Details Method for fabricating mirror array for optical projection syste Method for fabricating mirror array for optical projection syste

1990-03-16

1992-02-04

Ben, Loha

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

359855, 359900, G02B 2700

Patent

active

050854976

ABSTRACT:
A method for fabricating an array of mirrors for an optical projection system. This method comprises the steps of forming an array of holes between a top surface and a bottom surface on an electrically insulated substrate. These holes are then filled with an electrically conductive material. Another step in this method includes mounting a plurality of piezoelectric pedestals on the top surface of the substrate wherein each of the pedestals are disposed over a respective hole so that the first face of each of the pedestals is electrically connected to the conductive material in the respective holes. A plurality of mirrors are then mounted on the pedestals wherein each of the mirrors is disposed on at least one of the pedestals. After the mirrors are mounted the second face of each pedestal is electrically connected to a common circuit node.

REFERENCES:
patent: 3544201 (1970-12-01), Flower et al.
patent: 3758199 (1973-09-01), Thaxter
patent: 4525644 (1985-06-01), Frohlich
patent: 4736132 (1988-04-01), Culp

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