Method for fabricating micro-electro-mechanical systems

Details Method for fabricating micro-electro-mechanical systems Method for fabricating micro-electro-mechanical systems

2007-11-27

2007-11-27

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S831000, C029S846000, C200S181000, C200S600000, C333S262000, C438S048000, C438S052000

Reexamination Certificate

active

10966795

ABSTRACT:
The present invention relates to micro-electro-mechanical systems (MEMS). The present invention relates to a design feature that allows lower actuation voltage for electrostatically actuated structures (i.e., switches or mirrors). The present invention further relates to a method for fabricating such a design that allows lower actuation voltage.

REFERENCES:
patent: 5578976 (1996-11-01), Yao
patent: 6054659 (2000-04-01), Lee et al.
patent: 6310339 (2001-10-01), Hsu et al.
patent: 6396368 (2002-05-01), Chow et al.
patent: 6646215 (2003-11-01), Nelson
patent: 6746891 (2004-06-01), Cunningham et al.
patent: 6768403 (2004-07-01), Hsu et al.
patent: 7053737 (2006-05-01), Schwartz et al.

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