Method for fabricating metal micropatterns

Details Method for fabricating metal micropatterns Method for fabricating metal micropatterns

1998-07-23

2000-02-29

Gorgos, Kathryn

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating selected area

C25D 502

Patent

active

060305150

ABSTRACT:
A method for fabricating metal micropatterns. Trenches are introduced into a polymer layer. These trenches are filled with the metal micropatterns using an electroplating process. Before the deposition of the metal micropatterns, the side walls of the trenches are covered with insulating layers which adhere to the metal micropatterns after the polymer layer is removed.

REFERENCES:
patent: 4643804 (1987-02-01), Lynch et al.
patent: 4849370 (1989-07-01), Spratt et al.
patent: 4874484 (1989-10-01), Foell et al.
patent: 5547557 (1996-08-01), Asai et al.
patent: 5559058 (1996-09-01), Zory, Jr. et al.
patent: 5646464 (1997-07-01), Sickafus

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