Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-08-24
2010-06-15
Banks, Derris H (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603010, C029S603070
Reexamination Certificate
active
07735213
ABSTRACT:
Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.
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Matsusaki Tetsuya
Miyata Kazuhito
Seki Takateru
Watanabe Katsuro
Yasui Nobuto
Banks Derris H
Henkhaus John
Hitachi Global Storage Technologies - Netherlands B.V.
Parvez Azm
Townsend and Townsend / and Crew LLP
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