Method for fabricating magnetic head slider

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S603010, C029S603070

Reexamination Certificate

active

07735213

ABSTRACT:
Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

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patent: 6174736 (2001-01-01), Tsukamoto et al.
patent: 6920016 (2005-07-01), Yamakura et al.
patent: 7554769 (2009-06-01), Yamakura et al.
patent: 2004/0045671 (2004-03-01), Rejda et al.
patent: 2005/0068691 (2005-03-01), Kagami et al.
patent: 2006/0103987 (2006-05-01), Lille
patent: 11-175927 (1999-07-01), None
patent: 2003-086861 (2003-03-01), None
patent: 2005-108355 (2005-04-01), None

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