Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-07-05
2005-07-05
Trinh, Minh (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603090, C029S603150, C029S603250, C029S593000, C360S123090, C324S210000
Reexamination Certificate
active
06912770
ABSTRACT:
To fabricate a magnetic field sensor, a copper barrier film is formed. A magnetic metal film is formed on the barrier film. A plurality of trenches is formed with a desired thickness in the magnetic metal film. A copper film is formed in the plurality of trenches, so that multiple layers of magnetic metal film and copper film are formed. The RF semiconductor device equipped with the magnetic field sensor includes a magnetic field sensor made by the above method. The magnetic field sensor is attached on a semiconductor substrate. Metal wirings are formed at near the both sides of the magnetic field sensor. An insulating film is formed on top. An inductor is formed on the insulating film at predetermined locations.
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Kim Dong Joon
Lee Dok Won
Hynix / Semiconductor Inc.
Ladas & Parry LLP
Trinh Minh
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