Method for fabricating index-guided semiconductor laser

Details Method for fabricating index-guided semiconductor laser Method for fabricating index-guided semiconductor laser

1992-11-06

1995-04-04

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437133, 148DIG95, H01L 2120, H01L 21265

Patent

active

054037743

ABSTRACT:
A method of altering a refractive index, as for an optical waveguide, as in a buried heterostructure laser, by inducing disordering in a region of a semiconductor body comprises exposing a surface portion of the semiconductor body to plasma etching, coating at least a part of the surface portion with an oxide layer, heat treating the semiconductor body.

REFERENCES:
patent: 3929512 (1975-12-01), Nicholas et al.
patent: 3953243 (1976-04-01), Goetzberger
patent: 3969164 (1976-07-01), Cho et al.
patent: 4047976 (1977-09-01), Bledsoe et al.
patent: 4990466 (1991-02-01), Shieh et al.

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