Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-03-30
2008-11-04
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603120, C029S603160, C029S603140, C029S603180, C360S314000, C360S324000, C204S192340, C216S048000, C216S066000
Reexamination Certificate
active
07444739
ABSTRACT:
A magnetic head fabrication process in which a stencil layer is deposited upon a plurality of sensor layers. A photoresist mask in the desired read track width is fabricated upon the stencil layer. A reactive ion milling step is then conducted to remove the unmasked portions of the stencil layer. Where the stencil layer is composed of an organic compound, such as Duramide and/or diamond-like-carbon, a reactive ion milling step utilizing oxygen species produces a stencil of the present invention having exceptionally straight side walls with practically no undercuts. Thereafter, an ion milling step is undertaken in which the sensor layers that are not covered by the stencil are removed. The accurately formed stencil results in correspondingly accurately formed side walls of the remaining central sensor layers. A magnetic head sensor structure having a desired read track width and accurately formed side walls is thus fabricated.
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Feldbaum Michael
Jayasekara Wipul Pemsiri
Pinarbasi Mustafa Michael
Guillot Robert O.
Hitachi Global Storage Technologies - Netherlands B.V.
Intellectual Property Law Offices
Tugbang A. Dexter
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