Adhesive bonding and miscellaneous chemical manufacture – Methods
Patent
1974-04-15
1976-04-20
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Methods
29 2535, 65 31, 96 36, 96 384, 156 11, 156 15, 156 17, 156275, C23F 104
Patent
active
039517071
ABSTRACT:
A glass or other dielectric backed transducer structure is formed by utilizing a series of processes including at least one electrostatic bond. The processes enable one to bond a semiconductor wafer to a dielectric as a glass wafer. Then by selectively removing certain conductively semiconductor, one obtains a "thin ribbon" piezoresistive bridge secured to a thin glass wafer. The resultant structure is entirely unanticipated by the prior art.
A glass part is also formed by electrostatically bonding a glass wafer to a semiconductor wafer, polishing the glass to a desired depth, masking the polished glass layer according to a desired pattern representative of the glass part, etching away all the glass except the desired pattern, and thence removing all the semiconductor.
REFERENCES:
patent: 2709147 (1955-05-01), Ziegler
patent: 3160539 (1964-12-01), Hall et al.
patent: 3397278 (1968-08-01), Pomerantz
patent: 3417459 (1968-12-01), Pomerantz et al.
patent: 3503116 (1970-03-01), Strack
patent: 3534467 (1970-10-01), Sachs et al.
patent: 3595719 (1971-07-01), Pomerantz
patent: 3775839 (1973-12-01), Talmo et al.
patent: 3808065 (1974-04-01), Robinson et al.
patent: 3819431 (1974-06-01), Kurtz et al.
Bernstein Harold
Kurtz Anthony D.
Mallon Joseph R.
Weber Richard Alan
Kulite Semiconductor Products Inc.
Leitten Brian J.
Plevy Arthur L.
Powell William A.
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