Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
Reexamination Certificate
2009-06-19
2010-10-05
Bryant, Kiesha R (Department: 2891)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
Subsequent separation into plural bodies
C438S149000, C438S763000, C257SE21598, C257SE21705
Reexamination Certificate
active
07807551
ABSTRACT:
In a method for fabricating a flexible pixel array substrate, first, a release layer is formed on a rigid substrate. Next, on the release layer, a polymer film is formed, the adhesive strength between the rigid substrate and the release layer being higher than that between the release layer and the polymer film. The polymer film is formed by spin coating a polymer monomer and performing a curing process to form a polymer layer. Afterwards, a pixel array is formed on the polymer film. The polymer film with the pixel array formed thereon is separated from the rigid substrate.
REFERENCES:
patent: 6572780 (2003-06-01), McCormack et al.
patent: 6762510 (2004-07-01), Fock et al.
patent: 7045442 (2006-05-01), Maruyama et al.
“Office Action of Taiwan counterpart application”, issued on Aug. 28, 2009, p. 1-p. 8.
Chang Jung-Fang
Chen Yu-Hung
Huang Chin-Jen
Luo Yih-Rong
Bryant Kiesha R
Industrial Technology Research Institute
Jianq Chyun IP Office
Yang Minchul
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