Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With reflector – opaque mask – or optical element integral...
Reexamination Certificate
2005-08-23
2005-08-23
Wille, Douglas A. (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Incoherent light emitter structure
With reflector, opaque mask, or optical element integral...
C257S797000, C438S029000, C438S039000
Reexamination Certificate
active
06933536
ABSTRACT:
The present invention relates to a technique for fabricating a mechanical or visual alignment fiducial on a laser die particularly adapted for application with a laser die that is a buried structure edge emitting laser. In fabricating the device, the fiducial and the active mesa are formed in the same photolithography patterning step, using conventional techniques. The active is then buried with regrowth layers. The regrowth layers are subsequently selectively etched to expose the fiducial, leaving the active region protected and buried.
REFERENCES:
patent: 5511089 (1996-04-01), Yamada
patent: 6222206 (2001-04-01), Chirovsky et al.
Anderson Richard
Bowen Terry Patrick
Breedis John Baker
Jiang Ching-Long
Ring William Sean
Tyco Electronics Corporation
Wille Douglas A.
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