Optical waveguides – With optical coupler – Input/output coupler
Reexamination Certificate
2006-08-15
2006-08-15
Doan, Jennifer (Department: 2874)
Optical waveguides
With optical coupler
Input/output coupler
C385S015000, C385S031000
Reexamination Certificate
active
07092600
ABSTRACT:
A method for fabricating Fiber Bragg Grating elements and planar light circuits made thereof. A mask having a predetermined pattern and a wafer are provided, wherein a light-guiding channel filled with light-guiding substance is formed on the wafer. A photoresist layer is then formed to cover the wafer. Magnification of a photolithography apparatus is adjusted to a first Mag., followed by transferring the pattern on the mask to the photoresist layer to form a first pattern. Light-guiding substance not covered by the photoresist layer is then removed so that the first pattern is transferred to the light-guiding channel. The light-guiding channel then forms a Fiber Bragg Grating element.
REFERENCES:
patent: 4906063 (1990-03-01), Sato et al.
patent: 6303040 (2001-10-01), Oh et al.
patent: 6522812 (2003-02-01), Nikonov
patent: 6879756 (2005-04-01), Wakabayashi et al.
Chang Hsien-Tzu
Doong Jia-Ching
Hung Hao-Cheng
Koh Chao-Ming
Birch & Stewart Kolasch & Birch, LLP
Doan Jennifer
Vanguard International Semiconductor Corporation
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