Method for fabricating fiber bragg grating elements and...

Details Method for fabricating fiber bragg grating elements and... Method for fabricating fiber bragg grating elements and...

2005-12-20

2005-12-20

Doan, Jennifer (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

C385S015000, C385S031000

Reexamination Certificate

active

06978066

ABSTRACT:
A method for fabricating Fiber Bragg Grating elements and planar light circuits made thereof. A mask having a predetermined pattern and a wafer are provided, wherein a light-guiding channel filled with light-guiding substance is formed on the wafer. A photoresist layer is then formed to cover the wafer. Magnification of a photolithography apparatus is adjusted to a first magnification, followed by transferring the pattern on the mask to the photoresist layer to form a first pattern. Light-guiding substance not covered by the photoresist layer is then removed so that the first pattern is transferred to the light-guiding channel. The light-guiding channel then forms a Fiber Bragg Grating element.

REFERENCES:
patent: 4906063 (1990-03-01), Sato et al.
patent: 6303040 (2001-10-01), Oh et al.
patent: 6522812 (2003-02-01), Nikonov

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