Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2008-08-29
2010-10-12
Nguyen, Khiem D (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
C438S311000, C257S347000, C257SE27112, C257SE21545, C257SE21561
Reexamination Certificate
active
07811844
ABSTRACT:
A method for fabricating photonic and electronic devices on a substrate is disclosed. Multiple slabs are initially patterned and etched on a layer of a substrate. An electronic device is fabricated on a first one of the slabs and a photonic device is fabricated on a second one of the slabs, such that the electronic device and the photonic device are formed on the same layer of the substrate.
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Carothers Daniel N.
Conway Timothy J.
Giunta Joe
Hill Craig M.
Ishii Jonathan N.
BAE Systems Information and Electronic Systems Integration Inc.
Dillon & Yudell LLP
Long Daniel J.
Ng Antony P.
Nguyen Khiem D
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