Method for fabricating electroluminescence display device and el

Details Method for fabricating electroluminescence display device and el Method for fabricating electroluminescence display device and el

1990-01-17

1993-03-16

DeMeo, Palmer C.

Electric lamp and discharge devices

With luminescent solid or liquid material

Solid-state type

427 66, 427 70, H05B 3322, B05D 506

Patent

active

051947773

ABSTRACT:
A method for fabricating an electroluminescence display device is disclosed. The fabricating method includes steps of forming at least one transparent front electrode on a transparent substrate, forming a lower electrically insulating layer on the front electrode, forming an emitting layer of an electroluminescent material on the lower electrically insulating layer, forming an upper electrically insulating layer on the emitting layer, and forming at least one rear electrode on the upper electrically insulating layer. In the fabricating method, at least one of the lower and upper electrically insulating layers is composed of at least one film of Si.sub.x N.sub.y O.sub.z :H, and the si.sub.x N.sub.y O.sub.z :H film is formed by the plasma chemical vapor deposition method.

REFERENCES:
patent: 4686110 (1987-08-01), Endo et al.
patent: 4721631 (1988-01-01), Endo et al.
patent: 4880661 (1989-11-01), Endo et al.
patent: 4897319 (1990-01-01), Sun

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