Method for fabricating dual damascene structures using...

Details Method for fabricating dual damascene structures using... Method for fabricating dual damascene structures using...

2008-08-07

2010-11-23

Hug, Eric (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S090000, C425S150000, C425S174400, C425S369000, C264S227000, C264S241000, C264S293000, C264S338000, C216S044000, C216S047000, C216S054000

Reexamination Certificate

active

07837459

ABSTRACT:
The process of producing a dual damascene structure used for the interconnect architecture of semiconductor chips. More specifically the use of imprint lithography to fabricate dual damascene structures in a dielectric and the fabrication of dual damascene structured molds.

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