Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate
2011-07-19
2011-07-19
Del Sole, Joseph S (Department: 1743)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
C257S750000, C257S760000, C257S774000, C257S776000, C257SE23145, C428S044000, C428S201000, C430S313000, C430S314000, C430S317000, C430S323000, C438S046000, C438S618000, C438S700000, C264S338000, C264S480000, C264S494000
Reexamination Certificate
active
07982312
ABSTRACT:
The process of producing a dual damascene structure used for the interconnect architecture of semiconductor chips. More specifically the use of imprint lithography to fabricate dual damascene structures in a dielectric and the fabrication of dual damascene structured molds.
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Carter Kenneth Raymond
Colburn Matthew E.
McClelland Gary M.
Pfeiffer Dirk
Beck Thomas A.
Del Sole Joseph S
International Business Machines - Corporation
Malekzadeh Seyed Masoud
Morris Daniel P.
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