Method for fabricating dual damascence structures using...

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only

Reexamination Certificate

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Details

C425S810000, C425S470000, C425S472000, C216S072000

Reexamination Certificate

active

07435074

ABSTRACT:
The process of producing a dual damascene structure used for the interconnect architecture of semiconductor chips. More specifically the use of imprint lithography to fabricate dual damascene structures in a dielectric and the fabrication of dual damascene structured molds.

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