Method for fabricating diodes for electrostatic discharge protec

Details Method for fabricating diodes for electrostatic discharge protec Method for fabricating diodes for electrostatic discharge protec

1992-04-07

1993-12-21

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 57, 437 59, 437904, 257355, 257356, 257357, H01L 21265

Patent

active

052720977

ABSTRACT:
A novel process is taught for forming diodes simultaneously with the formation of typical prior art LDD MOS devices. The diodes thus formed have low breakdown voltages, making them suitable for use as voltage reference diodes, or diodes for ESD protection.

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Internal Chip ESD Phenomena Beyond the Protection Circuit in IEEE/IRPS 1988 pp. 19-25.
New ESD Protection Concept for VLSI CMOS Circuits Avoiding Circuit Stress 1991 EOS ESD Symposium Proceedings, pp. 74-82.

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