Method for fabricating controlled TCR thin film resistors

Details Method for fabricating controlled TCR thin film resistors Method for fabricating controlled TCR thin film resistors

1978-08-21

1980-10-07

Smith, John D.

Coating processes

Electrical product produced

Resistor for current control

427102, 427103, 427124, 427250, 427251, 29620, 75165, 75171, 204 27, H01C 700, H01C 702, H01C 704

Patent

active

042268990

ABSTRACT:
High stability thin film resistors are made from an alloy comprising selected portions of nickel, chromium, and gold selected in a ratio to provide the desired temperature coefficient of resistance (TCR). The resistors are made by co-depositing gold with the nickel chromium alloy by a flash evaporation process. The evaporation process is carried out by feeding a nickel chromium wire, having a gold wire extending therealong to provide the desired composition, onto a heated tungsten strip within a vacuum system with substrates disposed in a position to obtain uniform deposition of the evaporated material thereon.

REFERENCES:
patent: 3578420 (1971-05-01), Nishimura et al.

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