Method for fabricating chromeless phase shift mask

Details Method for fabricating chromeless phase shift mask Method for fabricating chromeless phase shift mask

2011-08-09

2011-08-09

Huff, Mark F (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C438S706000

Reexamination Certificate

active

07993803

ABSTRACT:
A method for fabricating a chromeless phase shift mask having a phase shift mask with a groove shape includes: forming a recess region with a first depth between the phase shift regions of a substrate; forming a plug for a mask that fills the recess region; forming a mask pattern aligned with the mask plug over the mask plug; and forming a groove with a second depth in the substrate by etching using the mask pattern.

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