Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2011-01-18
2011-01-18
Malsawma, Lex (Department: 2892)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C257SE51038, C427S384000
Reexamination Certificate
active
07871852
ABSTRACT:
A method for fabricating a carbon-enriched film includes the following steps. First, a substrate is provided. Next, a CFxfilm (fluorinated carbon films) containing carbon-fluoride bonded molecules is formed on the substrate. Next, a treatment process is performed on the CFxfilm to convert the carbon-fluoride bonded molecules into carbon-carbon bonded molecules.
REFERENCES:
patent: 6208075 (2001-03-01), Hung et al.
patent: 6208077 (2001-03-01), Hung
patent: 6878440 (2005-04-01), Takamatsu et al.
patent: 2004/0091713 (2004-05-01), Suwa et al.
Kao Yi-Lung
Shen Wen-Jian
Tang Shuenn-Jiun
Tzen Chih-Kwang
Chunghwa Picture Tubes Ltd.
Jianq Chyun IP Office
Malsawma Lex
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