Method for fabricating capacitor device

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor

Reexamination Certificate

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C257SE21350

Reexamination Certificate

active

10341252

ABSTRACT:
After a capacitor device including a lower electrode, a capacitor dielectric film made from a ferroelectric film and an upper electrode is formed on a substrate, an insulating film covering the capacitor device is formed. Subsequently, the capacitor device covered with the insulating film is annealed for crystallizing the ferroelectric film.

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