Method for fabricating capacitor device

Details Method for fabricating capacitor device Method for fabricating capacitor device

2007-01-02

2007-01-02

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C257SE21350

Reexamination Certificate

active

10341252

ABSTRACT:
After a capacitor device including a lower electrode, a capacitor dielectric film made from a ferroelectric film and an upper electrode is formed on a substrate, an insulating film covering the capacitor device is formed. Subsequently, the capacitor device covered with the insulating film is annealed for crystallizing the ferroelectric film.

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