Fishing – trapping – and vermin destroying
Patent
1989-07-12
1992-05-26
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
148DIG10, H01L 21265, H01L 21328
Patent
active
051167700
ABSTRACT:
A method for fabricating a bipolar or field effect-type integrated circuit transistor is provided in which non-cyrstalline semiconductor films and semiconductive regions formed in a single crystal semiconductor substrate and containing high concentrations of impurities are efficiently connected with improved electric characteristics while suppressing the influence of an increase in connection resistance caused by growth of a natural oxide film. Moreover, when a first non-crystalline semiconductor film is removed from a dielectric oxide film serving as a field film and a second non-crystalline semiconductor film is formed as a ribbon-shaped pattern on the exposed field film, a resistor of high accuracy can be formed. An interconnection system having resistors of a high accuracy and a fine size is also disclosed.
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Kajiyama Masaoki
Kameyama Shuichi
Kikuchi Kazuya
Sakai Hiroyuki
Chaudhuri Olik
Fourson G.
Matsushita Electric - Industrial Co., Ltd.
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