Method for fabricating an electrically programmable antifuse

Fishing – trapping – and vermin destroying

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437922, 148DIG55, 438701, H01L 2170, H01L 2700

Patent

active

056630913

ABSTRACT:
A method for fabricating the antifuse of the present invention comprises the steps of forming a lower antifuse electrode; forming a relatively thick interlayer dielectric layer over the surface of the lower antifuse electrode; forming a masking layer, preferably a photoresist, including an aperture therein having a first area over the interlayer dielectric layer; performing a first vertical etching step on the interlayer dielectric layer to a first selected depth; enlarging the aperture in the masking layer until it has a second area; performing a final vertical etching step on the interlayer dielectric layer to expose the upper surface of the lower electrode. Depending on the thickness of the interlayer dielectric, additional enlarging steps and vertical etching steps may be performed prior to the final vertical etching step which exposes the upper surface of the lower electrode. An aperture having a staircase profile is thereby formed, the aperture having a number of steps thus reducing and/or eliminating cusping and/or thinning at the corner and bottom of the antifuse cell opening allowing for the uniform deposit of dielectric and upper antifuse electrode materials.

REFERENCES:
patent: 3717852 (1973-02-01), Abbas et al.
patent: 4145803 (1979-03-01), Tasch et al.
patent: 4692787 (1987-09-01), Possley et al.
patent: 4800176 (1989-01-01), Kakumu et al.
patent: 5095362 (1992-03-01), Roesner
patent: 5100827 (1992-03-01), Lytle
patent: 5120679 (1992-06-01), Boardman et al.
patent: 5166556 (1992-11-01), Hsu et al.
patent: 5171715 (1992-12-01), Husher et al.
patent: 5196724 (1993-03-01), Gordon et al.
patent: 5233217 (1993-08-01), Dixit et al.
patent: 5242851 (1993-09-01), Choi
patent: 5248632 (1993-09-01), Tung et al.
patent: 5272101 (1993-12-01), Forouhi et al.
patent: 5290734 (1994-03-01), Boardman et al.
patent: 5300456 (1994-04-01), Tigelaar et al.
patent: 5322812 (1994-06-01), Dixit et al.

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