Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1996-12-26
1998-12-15
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, 313306, H01J 902
Patent
active
058489258
ABSTRACT:
A method for fabricating an array (300) of edge electron emitters (530) includes the steps of: forming first and second grooves (310, 320) in first and second opposing planar surfaces (101, 102), respectively, of a supporting substrate (110) to form an array of openings (330) therethrough; forming a dielectric layer (122) on the first planar surface (101) and an emission structure (120) on the dielectric layer (122); forming a plurality of cathodes (132) on the emission structure (120); forming gates (515) on a portion of the surfaces defining the first grooves (310); forming a masking film (710) on the cathodes (132)/emission structure (120); removing an outer, radial portion (726) of the masking film (710); etching the emission structure (120), the retracted masking film (710) forming a mask, thereby providing a predetermined configuration of the edge electron emitters (530) with respect to the gates (515) and cathodes (132).
REFERENCES:
patent: 4650435 (1987-03-01), Tamutus
patent: 5502348 (1996-03-01), Moyer et al.
patent: 5545946 (1996-08-01), Wiemann et al.
patent: 5691600 (1997-11-01), Moyer et al.
Howard Emmett
Jaskie James E.
Moyer Curtis D.
Dockrey Jasper W.
Motorola Inc.
Ramsey Kenneth J.
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