Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1997-02-03
1999-06-01
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
2041921, H01J 902
Patent
active
059083409
ABSTRACT:
A method for fabricating an array of conical electron emitters (410) includes the steps of: (i) positioning a collimator (160), including a plurality of collimation cells (162) having hexagonal cross-sections, between a substrate (155) having emitter wells (130) and a target (170) made from the emitter material, (ii) sputtering the target (170) so that it is partially collimated by the collimator (160), (iii) moving the substrate (155) within a plane defined by the substrate (155) so that the emitter wells (130) follow an emitter well path (220) which forms a 15.degree. path angle (235) with respect to a reference line (240) of the collimator (160).
REFERENCES:
patent: 5182256 (1993-01-01), Itozaki et al.
patent: 5344352 (1994-09-01), Horne et al.
van Veen et al., "Collimated Sputter Deposition, a Novel Method for Large Area Deposition of Spindt Type Field Emission Tips", Journal of Vacuum Science & Technology B, vol. 13, No. 2, Mar./Apr. 1995, pp. 478-481.
Baker Jeffrey
Polito Anthony
Siragusa Laura
Voight Steven A.
Motorola Inc.
Pickens S. Kevin
Ramsey Kenneth J.
Tobin Kate
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