Fishing – trapping – and vermin destroying
Patent
1992-12-18
1994-05-10
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437107, 437127, 437133, 437937, 437946, 148DIG17, 156643, H01L 2120
Patent
active
053106970
ABSTRACT:
A method for fabricating an AlGaInP semiconductor light emitting device having a substrate and a multilayer structure including an AlGaInP first semiconductor layer formed on the substrate. The method comprises the steps of removing part of the multilayer structure so that the first semiconductor layer is exposed, irradiating with plasma beams an oxide film formed on the exposed first semiconductor layer with the substrate temperature being kept at 500.degree. C. or less, so as to remove the oxide film from the first semiconductor layer and growing a second semiconductor layer on the first semiconductor layer.
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Hosoda Masahiro
Kan Yasuo
Takahashi Kosei
Tani Kentaro
Tsunoda Atsuo
Fleck Linda J.
Hearn Brian E.
Sharp Kabushiki Kaisha
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