Method for fabricating an acoustical resonator on a substrate

Details Method for fabricating an acoustical resonator on a substrate Method for fabricating an acoustical resonator on a substrate

2007-10-02

2007-10-02

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S594000, C029S846000, C029S902000, C310S321000, C427S100000

Reexamination Certificate

active

10384199

ABSTRACT:
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.

REFERENCES:
patent: 3590287 (1971-06-01), Berlincourt et al.
patent: 4320365 (1982-03-01), Black et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 5129132 (1992-07-01), Zdeblick et al.
patent: 5465725 (1995-11-01), Seyed-Bolorforosh
patent: 5587620 (1996-12-01), Ruby et al.
patent: 5692279 (1997-12-01), Mang et al.
patent: 5714917 (1998-02-01), Ella
patent: 5853601 (1998-12-01), Krishaswamy et al.
patent: 5872493 (1999-02-01), Ella
patent: 5873153 (1999-02-01), Ruby et al.
patent: 6060818 (2000-05-01), Ruby et al.
patent: 6111480 (2000-08-01), Iyama et al.
patent: 6262637 (2001-07-01), Bradley et al.
patent: 6278342 (2001-08-01), Ella
patent: 6307447 (2001-10-01), Barber et al.
patent: 6407649 (2002-06-01), Tikka et al.
patent: 6414569 (2002-07-01), Nakafuku
patent: 6566979 (2003-05-01), Larson et al.
patent: 6601276 (2003-08-01), Barber
patent: 6828713 (2004-12-01), Bradley et al.
patent: 6842088 (2005-01-01), Yamada et al.

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