Method for fabricating a vertical trench inductor

Details Method for fabricating a vertical trench inductor Method for fabricating a vertical trench inductor

1994-05-02

1994-12-13

Fourson, George

Fishing, trapping, and vermin destroying

437187, 437195, 437203, 296021, 336200, 336223, H01L 2170, H01L 2700

Patent

active

053729676

ABSTRACT:
A method of forming vertical trench inductor (10) includes providing a layer (11) and forming a plurality of trenches (12) vertically therein. The trenches (12) are filled with a conductive material (16) and etched using a photolithographically defined mask (17). The etching produces a conductive liner (18) covering two sidewalls (13) and a bottom surface (14) of the trench (12). A second conductive layer is formed and patterned to couple the conductive liner (18) covering a sidewall (13) of a first trench (12) to the conductive liner (18) of an opposite sidewall (13) of an adjacent trench (12) to form an inductive coil.

REFERENCES:
patent: 3881244 (1975-05-01), Kendall
patent: 4286374 (1981-09-01), Hantusch
patent: 4507853 (1985-04-01), McDavid

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