Method for fabricating a trench capacitor with an insulation...

Details Method for fabricating a trench capacitor with an insulation... Method for fabricating a trench capacitor with an insulation...

2005-07-12

2005-07-12

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

Making passive device

Trench capacitor

C438S246000, C438S525000

Reexamination Certificate

active

06916721

ABSTRACT:
A method for fabricating a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact, using a hard mask with a corresponding mask opening.

REFERENCES:
patent: 5360758 (1994-11-01), Bronner et al.
patent: 6423607 (2002-07-01), Heineck et al.
patent: 6426253 (2002-07-01), Tews et al.
patent: 6498061 (2002-12-01), Divakaruni et al.
patent: 6593612 (2003-07-01), Gruening et al.
patent: 198 43 641 (2000-04-01), None

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