Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate
2006-07-11
2006-07-11
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
Making passive device
Trench capacitor
C257S303000
Reexamination Certificate
active
07074689
ABSTRACT:
The present invention provides a method for fabricating a trench capacitor having an insulation collar (10; 10a, 10b) in a substrate (1), which is electrically connected to the substrate (1) on one side via a buried contact (15a, 15b), in particular for a semiconductor memory cell having a planar select transistor which is provided in the substrate (1) and is connected via the buried contact (15a, 15b), comprising the steps of: providing a trench (5) in the substrate (1) using a hard mask (2, 3) with a corresponding mask opening; providing a capacitor dielectric (30) in the lower and middle regions of the trench, the insulation collar (10) in the middle and upper regions of the trench and an electrically conductive filling (20) at least up to the top side of the insulation collar (10); completely filling the trench (5) with a filling material (50; 50′; 50″; 20); carrying out an STI trench production process; removing the filling material (50; 50′; 50″; 20) and lowering the electrically conductive filling (20) to below the top side of the insulation collar (10); forming an insulation region (IS; IS1, IS2) on one side with respect to the substrate (1) above the insulation collar (10); uncovering a connection region (KS; KS1, KS2) on the other side with respect to the substrate (1) above the insulation collar (10); and forming the buried contact (15a, 15b) by depositing and etching back a C filling (70; 70′; 70″; 70′″).
REFERENCES:
patent: 6291286 (2001-09-01), Hsiao
patent: 2001/0042880 (2001-11-01), Divakaruni et al.
patent: 2005/0026384 (2005-02-01), Kudelka et al.
patent: 2005/0191564 (2005-09-01), Huang et al.
patent: 102 55 846 (2004-04-01), None
Gutsche Martin
Seidl Harald
Infineon - Technologies AG
Jenkins Wilson Taylor & Hunt, P.A.
Lee Calvin
Nelms David
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